Siemens announced the acquisition of Canopus AI, an innovator in computational and AI-driven metrology solutions, enabling semiconductor manufacturers to achieve new levels of precision and efficiency in wafer and mask inspection processes. This acquisition strengthens Siemens’ position in the semiconductor manufacturing ecosystem and expands its semiconductor design and manufacturing digital thread by integrating additional cutting-edge metrology technologies, enhanced with advanced AI capabilities.
The semiconductor industry faces increasingly complex manufacturing challenges as device geometries continue to shrink and production volumes scale. Massive metrology has become critical to ensuring quality and yield in advanced semiconductor fabrication. Canopus AI’s innovative AI-powered solutions complement Siemens’ existing portfolio, providing semiconductor manufacturers with intelligent inspection and measurement capabilities that drive operational excellence.
Founded in 2021 and based in Grenoble, France, Canopus AI is a fast-growing software and AI company dedicated to revolutionizing wafer and mask metrology and inspection. Canopus AI is pioneering ‘Metrospection,’ a revolutionary approach that enhances metrology and inspection workflows with AI. By bridging the gap between conventional wafer metrology and inspection, this comprehensive software framework uses AI to help chip designers and manufacturers meet the extreme precision requirements of advanced technology nodes.
The transaction closed on January 12, 2026. To learn more about the Canopus AI acquisition and how Siemens is committed to leveraging AI technologies to solve critical challenges in semiconductor manufacturing, visit
For more information, visit siemens.com.
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